Japan, May 21 -- MKS INSTRUMENTS INC has got intellectual property rights for 'METHOD AND APPARATUS FOR PULSE GAS DELIVERY.' Other related details are as follows:
Application Number: JP,2024-164991
Category (FI): G01F1/00@X,G05D7/06@Z,G01F1/00@F,G01F1/34
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 24, 2024
Publication Date: Dec. 24, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....