Japan, March 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'MANUFACTURING METHOD OF MOUNTING TABLE, MOUNTING TABLE, AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2024-194118

Category (FI): H01L21/302,101@G,H01L21/68@R,H02N13/00@D,H10P50/20,101@G,H10P72/72

Stage: Grant (IP right document published.)

Filing Date: Nov. 6, 2024

Publication Date: Jan. 20, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....