Japan Intellectual Property Rights: MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE

Japan, July 14 -- SHINKAWA LTD has got intellectual property rights for 'MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE.' Other related details are as follows:

Application Number: JP,2023-062379

Category (FI): G01B11/24@K,G01B11/00@H,H01L21/52@F,H10W72/30@F

Stage: PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a semiconductor device that can detect an abnormality in a collet with a simple configuration.SOLUTION: A manufacturing apparatus 10 of a semiconductor device includes: a collet 30 having a suction hole 20 formed along a central axis and configured to suction-hold a semiconductor chip 100 on a holding surface 38 which is an end surface; an inspection camera 50 that images the collet 30 from below when it is not hol...