Japan, Aug. 14 -- CANON INC has got intellectual property rights for 'MANAGEMENT APPARATUS, PROCESSING SYSTEM, MANAGEMENT METHOD, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2022-067816
Category (FI): G03F7/20,521,G03F9/00@H,G05D3/12,305@V,H01L21/30,502@D,H01L21/68@G,H10P72/50@G,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 15, 2022
Publication Date: Oct. 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....