Japan, Feb. 27 -- SINFONIA TECHNOLOGY CO LTD has got intellectual property rights for 'LOAD PORT AND OPENING/CLOSING METHOD.' Other related details are as follows:
Application Number: JP,2022-101087
Category (FI): H01L21/68@T,H01L21/68@A,H10P72/30@A,H10P72/10@T
Stage: PROBLEM TO BE SOLVED: To provide a technique that can avoid unreasonable force causing deformation from acting on a door portion.SOLUTION: A load port 1 to be connected to a transport portion 8 includes a plate-shaped base portion 10 constituting a part of a wall portion of the transport portion 8, a mounting portion 20 on which a storage container 9 is mounted, a mounting portion drive mechanism 30 that moves the mounting portion 20 in a direction toward or away from the b...