Japan, Nov. 10 -- ASML NETHERLANDS BV,ASML HOLDING NV has got intellectual property rights for 'LITHOGRAPHIC APPARATUS AND ILLUMINATION UNIFORMITY CORRECTION SYSTEM.' Other related details are as follows:
Application Number: JP,2024-197801
Category (FI): G03F7/20,501
Stage: Grant (IP right document published.)
Filing Date: Nov. 13, 2024
Publication Date: Feb. 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....