Japan, Aug. 12 -- ASML NETHERLANDS BV,ASML HOLDING NV has got intellectual property rights for 'LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD.' Other related details are as follows:
Application Number: JP,2025-088086
Category (FI): G03F7/20,521,H10P72/50@K,H01L21/68@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 27, 2025
Publication Date: Aug. 7, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....