Japan, March 25 -- TOKYO ELECTRON LTD has got intellectual property rights for 'LIQUID PROCESSING DEVICE, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM.' Other related details are as follows:
Application Number: JP,2022-028286
Category (FI): H10P76/00,564@C,B05C11/08,G03F7/16,502,G03F7/30,502,H01L21/30,564@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 25, 2022
Publication Date: Sept. 6, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....