Japan, Sept. 7 -- TOWA CORP has got intellectual property rights for 'INSPECTION SYSTEM, SEMICONDUCTOR MANUFACTURING APPARATUS, AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2023-210826
Category (FI): H01L21/66@J,H10P74/20@J,G01N21/956@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 14, 2023
Publication Date: June 26, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....