Japan, June 16 -- KIOXIA CORP has got intellectual property rights for 'INSPECTION DEVICE, METHOD OF MANUFACTURING TEMPLATE, AND INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-099730
Category (FI): G01N21/956@A,H01L21/30,502@D,H01L21/66@J,H10P74/20@J,H10P76/00,600
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 21, 2022
Publication Date: Jan. 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....