Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'INFORMATION PROCESSING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND PROCESSING CONDITION DETERMINING METHOD.' Other related details are as follows:
Application Number: JP,2023-047174
Category (FI): H01L21/306@R,H10P50/60@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 23, 2023
Publication Date: Oct. 4, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....