Japan Intellectual Property Rights: INFORMATION COLLECTION SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, ELECTRON BEAM EXPOSURE DEVICE, AND SUBSTRATE PROCESSING METHOD OF ELECTRON BEAM EXPOSURE DEVICE

Japan, March 23 -- NUFLARE TECHNOLOGY INC has got intellectual property rights for 'INFORMATION COLLECTION SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, ELECTRON BEAM EXPOSURE DEVICE, AND SUBSTRATE PROCESSING METHOD OF ELECTRON BEAM EXPOSURE DEVICE.' Other related details are as follows:

Application Number: JP,2023-026233

Category (FI): G03F7/20,504,H01J37/305@B,H01L21/30,541@C,H01L21/30,541@U,H01L21/30,541@Z,H10P76/00,541@C,H10P76/00,541@U,H10P76/00,541@Z

Stage: Grant (IP right document published.)

Filing Date: Feb. 22, 2023

Publication Date: Sept. 3, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....