Japan, Nov. 10 -- CANON INC has got intellectual property rights for 'ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, ADJUSTMENT METHOD AND PRODUCTION METHOD OF ARTICLE.' Other related details are as follows:

Application Number: JP,2022-067119

Category (FI): G03F7/22@H,G03F7/20,501,G03F7/20,521

Stage: Grant (IP right document published.)

Filing Date: April 14, 2022

Publication Date: Oct. 26, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....