Japan, Aug. 14 -- CANON INC has got intellectual property rights for 'ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE.' Other related details are as follows:
Application Number: JP,2022-075410
Category (FI): G03F7/20,501,G02B3/00@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 28, 2022
Publication Date: Nov. 10, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....