Japan Intellectual Property Rights: HOLDING DEVICE

Japan, March 5 -- NGK SPARK PLUG CO LTD has got intellectual property rights for 'HOLDING DEVICE.' Other related details are as follows:

Application Number: JP,2025-102336

Category (FI): H01L21/302,101@G,H01L21/31@C,H01L21/68@R,H02N13/00@D,H10P14/60,101@C,H10P50/20,101@G,H10P72/70,H10P72/72

Stage: PROBLEM TO BE SOLVED: To provide a holding device capable of improving a processing speed in an outer peripheral area of a target to be held.SOLUTION: In an electrostatic chuck 1 comprising a tabular member 10, a base member 20 and a junction layer 30 joining the tabular member 10 and the base member 20, the tabular member 10 includes an inside part 10a in a central part in a surface direction and an outside part 10b in an outer peripheral part...