Japan, March 23 -- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE has got intellectual property rights for 'HIGH-CONDUCTIVE PASSIVATION LAYER AND METHOD FOR FORMING THEM DURING HIGH-ASPECT-RATIO PLASMA ETCHING.' Other related details are as follows:

Application Number: JP,2024-187281

Category (FI): H01L21/302,105@A,H10P50/20,105@A,H10P50/20,400,H10P50/24,H10P50/28

Stage: Grant (IP right document published.)

Filing Date: Oct. 24, 2024

Publication Date: Feb. 4, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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