Japan Intellectual Property Rights: HETERODYNE LIGHT SOURCE FOR USE IN METROLOGY SYSTEM

Japan, Sept. 16 -- MITSUTOYO CORP has got intellectual property rights for 'HETERODYNE LIGHT SOURCE FOR USE IN METROLOGY SYSTEM.' Other related details are as follows:

Application Number: JP,2022-137191

Category (FI): G01B9/021,G01B9/02002,G01B11/24@D,G01B9/02003

Stage: PROBLEM TO BE SOLVED: To solve the problem that workpiece quality management is becoming more demanding in terms of throughput, measurement resolution, and accuracy.SOLUTION: A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates...