Japan, Sept. 7 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FREQUENCY VARIABLE POWER SUPPLY AND PLASMA PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-170045
Category (FI): H03H7/40,H10P50/20,101@B,H01L21/302,101@B,H05H1/46@R,H05H1/46@M
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 24, 2022
Publication Date: May 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....