Japan, June 10 -- DISCO CORP has got intellectual property rights for 'FOREIGN MATTER REMOVAL METHOD.' Other related details are as follows:
Application Number: JP,2022-043613
Category (FI): H01L21/304,641,H10P70/00,101,B08B1/10,B08B1/00
Stage: Grant (IP right document published.)
Filing Date: March 18, 2022
Publication Date: Sept. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....