Japan Intellectual Property Rights: FOREIGN MATTER REMOVAL METHOD, FORMING METHOD, MANUFACTURING METHOD FOR ARTICLE, FOREIGN MATTER REMOVAL DEVICE, SYSTEM, AND TEMPLATE

Japan, June 16 -- CANON INC has got intellectual property rights for 'FOREIGN MATTER REMOVAL METHOD, FORMING METHOD, MANUFACTURING METHOD FOR ARTICLE, FOREIGN MATTER REMOVAL DEVICE, SYSTEM, AND TEMPLATE.' Other related details are as follows:

Application Number: JP,2022-073675

Category (FI): H10P70/00,103@Z,H10P70/00,107@A,H10P70/00,105@C,H10P70/00,103,H10P76/00,600,H10P76/00,564@Z,H01L21/304,651,H01L21/304,645@C,H01L21/304,647@A,H01L21/304,643,B29C59/02@Z,H01L21/30,564@Z,H01L21/30,502@D,H10P70/00,201@Z,H10P70/00,105@Z,H10P70/00,201

Stage: Grant (IP right granted following substantive examination.)

Filing Date: April 27, 2022

Publication Date: Nov. 9, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100...