Japan, May 18 -- KAO CORP has got intellectual property rights for 'FILTRATION METHOD FOR ETCHANT COMPOSITION.' Other related details are as follows:
Application Number: JP,2022-102003
Category (FI): C23F1/16,H10P50/66,C23F1/46,H01L21/308@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 24, 2022
Publication Date: Jan. 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....