Japan, Sept. 3 -- ULVAC JAPAN LTD has got intellectual property rights for 'FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2022-096719
Category (FI): C23C14/22@F,C23C14/34@R,H01L21/203@S,H10P14/22,C23C14/06@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 15, 2022
Publication Date: Dec. 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....