Japan, June 10 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2022-049569
Category (FI): H01L21/31@B,C23C16/44@A,H10P14/692@X,H10P14/60,101@B,H01L21/316@X
Stage: Grant (IP right document published.)
Filing Date: March 25, 2022
Publication Date: Oct. 5, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....