Japan, Nov. 10 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-059070
Category (FI): C23C14/34@J,C23C14/50@K,H01L21/68@A,H10P72/30@A,C23C14/56@G
Stage: Grant (IP right document published.)
Filing Date: March 31, 2021
Publication Date: Oct. 14, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....