Japan, Nov. 10 -- CANON TOKKI CORP has got intellectual property rights for 'FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2021-144915
Category (FI): H01L21/68@R,C23C14/24@J,H10P72/30@A,H10P72/72,H01L21/68@A,C23C14/56@G
Stage: Grant (IP right document published.)
Filing Date: Sept. 6, 2021
Publication Date: March 16, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....