Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'FILM DEPOSITION APPARATUS AND CONTROL METHOD OF FILM DEPOSITION APPARATUS.' Other related details are as follows:
Application Number: JP,2022-114359
Category (FI): C23C14/34@C
Stage: Grant (IP right document published.)
Filing Date: July 15, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....