Japan, July 31 -- GIGAPHOTON INC has got intellectual property rights for 'EXTREME-ULTRAVIOLET LIGHT GENERATION DEVICE AND ELECTRONIC DEVICE PRODUCTION METHOD.' Other related details are as follows:
Application Number: JP,2022-040629
Category (FI): H05G2/00@K,G03F7/20,503,G03F1/84
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 15, 2022
Publication Date: Sept. 28, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....