Japan, Aug. 14 -- CANON INC has got intellectual property rights for 'EXPOSURE APPARATUS, EXPOSURE METHOD, PRODUCTION METHOD OF ARTICLE.' Other related details are as follows:
Application Number: JP,2022-067118
Category (FI): G03F7/20,521,G03F7/20,501
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 14, 2022
Publication Date: Oct. 26, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....