Japan Intellectual Property Rights: ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM

Japan, Sept. 28 -- TOKYO ELECTRON LTD has got intellectual property rights for 'ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM.' Other related details are as follows:

Application Number: JP,2022-148754

Category (FI): H01L21/30,569,H01L21/304,643@A,H01L21/304,643@C,H01L21/304,648@G,H01L21/306@J,H10P50/60@J,H10P70/00,103@A,H10P70/00,103@C,H10P70/00,108@G,H10P76/00,569

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 20, 2022

Publication Date: April 2, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....