Japan Intellectual Property Rights: EQUIPMENT FOR TRANSPORTING MEMBER LOCATED IN SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR TRANSPORTING MEMBER

Japan, March 25 -- TOKYO ELECTRON LTD has got intellectual property rights for 'EQUIPMENT FOR TRANSPORTING MEMBER LOCATED IN SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR TRANSPORTING MEMBER.' Other related details are as follows:

Application Number: JP,2022-035438

Category (FI): H01L21/68@A,H10P72/30@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 8, 2022

Publication Date: Sept. 21, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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