Japan, May 21 -- TOTO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK.' Other related details are as follows:
Application Number: JP,2022-154887
Category (FI): H01L21/68@R,H10P72/72,H10P50/20,101@G,H10P14/60,101@F,H01L21/31@F,H01L21/302,101@G,H05B3/48,H05B3/10@A,H05B3/74,C23C16/458,C23C14/50@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 28, 2022
Publication Date: Oct. 12, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....