Japan, July 27 -- SUMITOMO OSAKA CEMENT CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK DEVICE.' Other related details are as follows:
Application Number: JP,2022-141282
Category (FI): H01L21/205,C23C16/44@B,C23C14/50@A,H10P72/72,H10P14/60,101@B,H10P50/20,101@G,H01L21/302,101@G,H01L21/31@B,H10P14/24,H01L21/68@R
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 6, 2022
Publication Date: March 18, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....