Japan, Oct. 5 -- TOMOEGAWA PAPER CO LTD has got intellectual property rights for 'ELECTROSTATIC CHUCK DEVICE AND MANUFACTURING METHOD THEREOF.' Other related details are as follows:
Application Number: JP,2021-042575
Category (FI): H01L21/68@R,H02N13/00@D,H10P72/72
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 16, 2021
Publication Date: Sept. 30, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....