Japan, March 24 -- SINFONIA TECHNOLOGY CO LTD has got intellectual property rights for 'EFEM.' Other related details are as follows:
Application Number: JP,2021-146406
Category (FI): F24F7/06@C,H10P95/00,201@D,H01L21/02@D,H01L21/68@A,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Sept. 8, 2021
Publication Date: March 20, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....