Japan Intellectual Property Rights: DRYNESS DETECTION METHOD AND WORKPIECE PROCESSING METHOD

Japan, Aug. 24 -- DISCO CORP has got intellectual property rights for 'DRYNESS DETECTION METHOD AND WORKPIECE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-001069

Category (FI): H01L21/78@B,H01L21/78@M,G01N21/64@Z,H10P58/00@B,H10P58/00@M,H10P52/00@M

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 6, 2023

Publication Date: July 19, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....