Japan, March 25 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'DRYING DEVICE AND METHOD FOR CHECKING DRYING STATE.' Other related details are as follows:
Application Number: JP,2023-049623
Category (FI): H01L21/304,648@G,H01L21/304,648@E,H01L21/68@V,H10P70/00,108@E,H10P70/00,108@G,H10P70/00,201@K,F26B5/04,H10P72/10@T,H01L21/304,651@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 27, 2023
Publication Date: Oct. 9, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....