Japan, March 27 -- SHIN ETSU HANDOTAI CO LTD has got intellectual property rights for 'DOUBLE-SIDED POLISHING METHOD, CARRIER FOR DOUBLE-SIDED POLISHING DEVICE AND DOUBLE-SIDED POLISHING DEVICE.' Other related details are as follows:
Application Number: JP,2023-024181
Category (FI): B24B37/005@A,B24B37/08,B24B37/28,H01L21/304,621@A,H01L21/304,622@G,H10P52/00@B,H10P52/00@F,H10P52/00@K
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 20, 2023
Publication Date: Aug. 30, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....