Japan, July 14 -- ADTEC ENGINEENG CO LTD has got intellectual property rights for 'DIGITAL EXPOSURE DEVICE.' Other related details are as follows:
Application Number: JP,2022-140418
Category (FI): G03F7/20,505
Stage: PROBLEM TO BE SOLVED: To achieve both high resolution and productivity improvement with respect to a digital exposure device using a spatial light modulator.SOLUTION: A substrate W is moved through an exposure work area E irradiated with light of a pattern formed by first and second spatial light modulators 21, 22. The respective pixels of the first spatial light modulator 21 and the second spatial light modulator 22 are turned ON/OFF with an ON/OFF period as a unit by a modulator control system 8, and the first spatial ligh...