Japan Intellectual Property Rights: DETECTION SYSTEM AND DETECTION METHOD CAPABLE OF DETECTING RIPPLE DEFECT OF QUARTZ WAFER

Japan, May 13 -- CHROMA ATE INC has got intellectual property rights for 'DETECTION SYSTEM AND DETECTION METHOD CAPABLE OF DETECTING RIPPLE DEFECT OF QUARTZ WAFER.' Other related details are as follows:

Application Number: JP,2024-106523

Category (FI): H10P50/60@Z,H01L21/68@L,H10P74/20@J,H01L21/66@J,H01L21/306@Z,H10P72/00@L,H10P52/00@V,H01L21/304,622@S

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 2, 2024

Publication Date: April 4, 2025

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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