Japan, March 25 -- CANON INC has got intellectual property rights for 'DETECTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND ARTICLE MANUFACTURING METHOD.' Other related details are as follows:

Application Number: JP,2021-197756

Category (FI): G03F9/00@H,G03F9/00@Z

Stage: Grant (IP right document published.)

Filing Date: Dec. 6, 2021

Publication Date: June 16, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....