Japan, April 28 -- VERSUM MATERIALS US LLC has got intellectual property rights for 'DEPOSITION OF CARBON DOPED SILICON OXIDE.' Other related details are as follows:

Application Number: JP,2024-153385

Category (FI): C07F7/08@R,C07F7/10@F,C07F7/10@W,C23C16/455,C23C16/42,H01L21/316@X,H10P14/692@X,C07F7/10@S

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Sept. 5, 2024

Publication Date: Dec. 3, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....