Japan, Feb. 27 -- TASMIT INC,TORAY ENG CO LTD has got intellectual property rights for 'DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-050008
Category (FI): G01N21/956@A
Stage: PROBLEM TO BE SOLVED: To provide a defect inspection device with which it is possible to automatically detect an optimum optical condition for capturing an image of a region that includes a defect by a simple method.SOLUTION: A defect inspection device 1 comprises an optical microscope 10 that is provided with an image-capturing unit 14 that captures an image of a chip 31, a control unit 20 that controls an optical condition for capturing the image of a chip, and a storage unit 25 in which ...