Japan, Oct. 21 -- SHIN ETSU HANDOTAI CO LTD has got intellectual property rights for 'DEFECT EVALUATION METHOD FOR SEMICONDUCTOR SILICON WAFER.' Other related details are as follows:
Application Number: JP,2024-064233
Category (FI): H01L21/66@N,H10P74/20@N,G01N21/956@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 11, 2024
Publication Date: Oct. 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
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