Japan Intellectual Property Rights: CUTTING DEVICE

Japan, Sept. 16 -- DISCO CORP has got intellectual property rights for 'CUTTING DEVICE.' Other related details are as follows:

Application Number: JP,2022-183902

Category (FI): H01L21/78@F,H10P58/00@F

Stage: PROBLEM TO BE SOLVED: To provide a cutting device which prevents an objective lens of imaging means from being contaminated by cutting water and which prevents imaging by the imaging means from being interfered by the cutting water.SOLUTION: Imaging means 9 comprises: a camera 91; a group lens 92 that is connected to the camera 91 and expands the imaging area; a cover lens 93 that covers an objective lens 921 of the group lens 92; a fluid spray nozzle 94 that sprays fluid L1 containing water to the cover lens 93; a fluid removal nozz...