Japan, Aug. 6 -- TOKYO ELECTRON LTD has got intellectual property rights for 'CONVEYANCE SYSTEM, PROCESSING SYSTEM, AND CONVEYANCE METHOD.' Other related details are as follows:
Application Number: JP,2022-191936
Category (FI): H01L21/68@A,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 30, 2022
Publication Date: June 11, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....