Japan, Sept. 3 -- ASM IP HOLDING BV has got intellectual property rights for 'CONTAMINANT TRAP SYSTEM FOR REACTOR SYSTEM.' Other related details are as follows:
Application Number: JP,2022-085216
Category (FI): C23C14/00@B,H10P14/60,101@F,C23C16/44@J,H01L21/31@F
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 25, 2022
Publication Date: Dec. 8, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....