Japan, June 10 -- DISCO CORP has got intellectual property rights for 'CLEANING DEVICE.' Other related details are as follows:
Application Number: JP,2022-081313
Category (FI): H01L21/304,643@C,H10P70/00,103@A,H10P70/00,103@C,H01L21/304,643@A
Stage: Grant (IP right document published.)
Filing Date: May 18, 2022
Publication Date: Dec. 1, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....