Japan Intellectual Property Rights: CLEANING APPARATUS

Japan, July 14 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'CLEANING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-151470

Category (FI): H10P70/00,103@A,B08B1/20,B08B1/12,B08B1/00,B08B3/02@B,H01L21/304,643@A,H01L21/304,644@B,H10P70/00,104@B,B08B1/40

Stage: PROBLEM TO BE SOLVED: To provide a cleaning apparatus which can prevent penetration of a cleaning fluid into a rotary mechanism and prevent adhesion of dust from the rotary mechanism to a substrate.SOLUTION: In a cleaning apparatus, each of multiple rollers which contact with an outer periphery of a substrate W to rotate the substrate W has: a transmission part 101; a rotation mechanism 110 which rotates the transmission part 1...