Japan, April 1 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING PROCESS.' Other related details are as follows:
Application Number: JP,2022-127513
Category (FI): G03F7/20,521,C08F8/00,G03F7/039,601,G03F7/004,501,G03F7/004,503@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 10, 2022
Publication Date: Feb. 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....