Japan, April 1 -- SHIN ETSU CHEM CO LTD has got intellectual property rights for 'CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN FORMING PROCESS.' Other related details are as follows:

Application Number: JP,2022-127513

Category (FI): G03F7/20,521,C08F8/00,G03F7/039,601,G03F7/004,501,G03F7/004,503@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Aug. 10, 2022

Publication Date: Feb. 26, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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